Capacitive Angle Sensor Research Using COMSOL Multiphysics

This paper presents a method of simulating capacitive sensor using COMSOL Multiphysics. A petal-form sensitive electrode structure applied to angle was simulated software; the calculated sines and cosines with capacitance value fill in simulation sensor. First, according construction principle structure, GeoGebra graphing calculator theoretical analysis expression function used obtain two-dimensional target structure. Second, holistic structural model completed by importing it into Multiphysics setting electrical mechanical rotation parameters, which realized process. Finally, because errors were found, design improved introducing an between partition domain, reduced. The resulting curves angles consistent theory; results showed that maximum difference 0.0175° minimum 0.0018° single cycle